optical thin-films deposition machines(electron gun)

antireflective film, reflective film, filter film, beam-splitting film, color film - details see: https://www.machineto.com/optical-thin-films-deposition-machines-electron-gun-10084960
Condition:NewPlace of Origin:Shanghai China (Mainland)Brand Name:VAKIAModel Number:OEC-1350
Voltage:380VPower(W):45KWDimension(L*W*H):3X3X2MWeight:4T
Certification:ISO9001:2001Warranty:1 yearAfter-sales Service Provided:Engineers available to service machinery overseascolor consistency:good
luster:goodfirmness:stronghardness:high 
optical thin-films deposition machines(electron gun)
contact supplier for optical thin-films deposition machines(electron gun)


Feature:

1 Equipped with E-beam gun,thermal evaporator source,ion source,heater,IPC control system,optic film deposition controllers.

2 Kinds of dielectric film:antireflection film,filter film,beam-splitting film,color film

3 Deposited protective film:rigid hydrophobic membrane,DLC

Application:

Optical lens,Glasses,Reflective glass,Cold light cups,Accessories

Model

Function

VAKIA-OEC-900VAKIA-OEC-1200VAKIA-OEC-1350
Vacuum Chamber

Inner Size

φ900*H1050mmφ1200*H1250mmφ1350*H1450mm
frock clampArch single workpiece

tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min,

Continuously Variable

Transmission

1 Arch single workpiece tray,satisfy customers’

demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission.

2 Arch three workpiece tray,planetary,

revolution-autorotation, satisfy customers’

demand of productivity,rotate 5 to 30 r/min,

Continuously Variable Transmission

Vacuum system

Diffusion pump

KT-600(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

Diffusion pump

KT-800(VAKIA),

Roots Pump ZJ-600,

Mechanical pump2X-70,

Holding pump2X-8,

Pipeline is made of

304 Stainless Steel

Diffusion pump

KT-800(VAKIA),

Roots Pump ZJ-300,

Mechanical pump2X-70,

Holding pump2X-15,

Pipeline is made of

304 Stainless Steel

Ultimate Vacuum:superior to 6.0×10-4Pa

Be equipped with anti-turbulence device,safety interlock, Automatic and Manual operation mode optional

Heating System

Heating on the thermotube,PID control,highest 350 °C±1.5°C

Inflation of process gas

Gas mass control meter or gas filled valve

Which can be manually fine tuning

Vacuum Ion

bombardment

Direct Current3KV,0.6KW clavate cathode(used for cleaning

Workpiece by itself before coating) and gas ion source select

Evaporation source(selected)

1 Electron gun:6KW,high pressure4 KV to 10 KV adjustable. Positioning scanning,triangular scanning,circular scanning,spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility

2 crucible:six pointsφ38*20 crucible or four pointsφ38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ48*18

Ion source(selected)

1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring the higher refractivity,firmness,good

compactness and strong adhesion

Coating control

system(selected)

Quartz crystal film thickness control meter:can store up 1 to 99 layer

automation coating process,99 kinds of data,is of high precision

Optical film thickness control meter:adopted multi-wave full spectrum

destination analysis technology,judge film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision

optical thin-films deposition machines(electron gun)
Packaging Detail:With fumigation wooden cases.
Delivery Detail:Since the day of payment of deposit within 60 working days.

Related Product for optical thin-films deposition machines(electron gun)