optical thin-films deposition machines(electron gun)
Condition:New | Place of Origin:Shanghai China (Mainland) | Brand Name:VAKIA | Model Number:OEC-1350 |
Voltage:380V | Power(W):45KW | Dimension(L*W*H):3X3X2M | Weight:4T |
Certification:ISO9001:2001 | Warranty:1 year | After-sales Service Provided:Engineers available to service machinery overseas | color consistency:good |
luster:good | firmness:strong | hardness:high |
Feature:
1 Equipped with E-beam gun,thermal evaporator source,ion source,heater,IPC control system,optic film deposition controllers.
2 Kinds of dielectric film:antireflection film,filter film,beam-splitting film,color film
3 Deposited protective film:rigid hydrophobic membrane,DLC
Application:
Optical lens,Glasses,Reflective glass,Cold light cups,Accessories
Model Function | VAKIA-OEC-900 | VAKIA-OEC-1200 | VAKIA-OEC-1350 |
Vacuum Chamber Inner Size | φ900*H1050mm | φ1200*H1250mm | φ1350*H1450mm |
frock clamp | Arch single workpiece tray,satisfy customers’ demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission | 1 Arch single workpiece tray,satisfy customers’ demand of uniformity to a greater extent,rotate 5 to 30 r/min, Continuously Variable Transmission. 2 Arch three workpiece tray,planetary, revolution-autorotation, satisfy customers’ demand of productivity,rotate 5 to 30 r/min, Continuously Variable Transmission | |
Vacuum system | Diffusion pump KT-600(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel | Diffusion pump KT-800(VAKIA), Roots Pump ZJ-600, Mechanical pump2X-70, Holding pump2X-8, Pipeline is made of 304 Stainless Steel | Diffusion pump KT-800(VAKIA), Roots Pump ZJ-300, Mechanical pump2X-70, Holding pump2X-15, Pipeline is made of 304 Stainless Steel |
Ultimate Vacuum:superior to 6.0×10-4Pa | |||
Be equipped with anti-turbulence device,safety interlock, Automatic and Manual operation mode optional | |||
Heating System | Heating on the thermotube,PID control,highest 350 °C±1.5°C | ||
Inflation of process gas | Gas mass control meter or gas filled valve Which can be manually fine tuning | ||
Vacuum Ion bombardment | Direct Current3KV,0.6KW clavate cathode(used for cleaning Workpiece by itself before coating) and gas ion source select | ||
Evaporation source(selected) | 1 Electron gun:6KW,high pressure4 KV to 10 KV adjustable. Positioning scanning,triangular scanning,circular scanning,spiral scanning,orthogonal scanning,sine wave, focusing capability of beam spot is good,positioning accuracy is high, good reproducibility | ||
2 crucible:six pointsφ38*20 crucible or four pointsφ38*20 plus anotherpoint arc crucible which center arc length is 87(used for high consumption and low melting point of evaporation material) or crucibleφ48*18 | |||
Ion source(selected) | 1.5KV hall ion source:used for cleaning before electroplating or assisted deposition,which helped acquiring the higher refractivity,firmness,good compactness and strong adhesion | ||
Coating control system(selected) | Quartz crystal film thickness control meter:can store up 1 to 99 layer automation coating process,99 kinds of data,is of high precision | ||
Optical film thickness control meter:adopted multi-wave full spectrum destination analysis technology,judge film layer through the curve analysis of 370 to 870mm transmissivity (or reflectivity) of monitoring chips,can achieve high control precision |
Packaging Detail:With fumigation wooden cases. |
Delivery Detail:Since the day of payment of deposit within 60 working days. |