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Magnetron sputtering ITO film coating equipment/ AZO coating equipment:, 1.Passed the ISQ9000., 2.It has 7 vacuum chambers . - details see: https://www.machineto.com/magnetron-sputtering-ito-film-coating-equipment-azo-coating-equipment-10162266

The horizontal/vertical continuous magnetron sputtering ITO film coating machine 7 vacuum chambers, Part 1 is the entrance chamber; part 2 is entrance buffering chamber; part 3is the entrance transfer chamber, part 4is the process chamber; part 5 is the exit transfer chamber; part 6 is the exit buffering chamber; part 7 is the exit chamber; Two pairs of mid-frequency dual Si target which is controlled by PUC04 closed loop ring form the high-quality SiO2 isolating layer; 10 pairs of column AZO target realize the high-quality AZO transparent conductive film; the dimension of processing in design is the plane base plate materials of 1100mm wide and 1400mm long. The cycle of production and processing can be optimized to 100-180 second. The production has the advanced design which uses the molecular pump to form the atmosphere separation by pumping. Also, it has used the turbo-molecular pump to get high-efficiency isolation, stable pumping speed and even distribution if air.

1. Technical characteristics of productionline

equipment type	horizontal/vertical continuous magnetron sputtering coating line
dimension of carrier	designed according to the substrate of 1×1100mm× 1400mm(×3mm (can be customized according to requirements )
design requirements of film uniformity	in area of effective deposit, the uniformity of film thickness ≤±5%
cathode structure	adopt the mid-frequency dual rotary cathode
Driving mode	adopt the small vertial vehicle which is driven by double friction to load the carrier (vertical)or magnetic steering friction drive(horizontal)
realization of coating technology	adopt the ZnO: A1 ceramic target and reactive sputtering deposit technology
Control of coating temperature	adopt the stainless sheathed heating device (can use the light tube to heat according to requirements of customers); the highest temperature is 350Degrees Celsius. Within the range from ambient temperature to 400 Degrees Celsius, it can be designed according the any setting; the stability of control is ±5Degrees Celsius
control system	the control system can realize the man-machine dialogue and carry out necessary intervention in production process. During operating process, there are alarm indication and error display; the alarm display can indicate the correct operation and troubleshooting for operators.

2.Main technical parameters

Final vacuum	6 × 1 0E-4 Pa
Average production cycle	80-180 seconds / frame
Carrier size	1100 mm× 1400mm (can be customized on request)
Film uniformity	±5%