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This equipment has a multi-target magnetron sputtering function. It is matched with two magnetron targets and reserves one targe - details see: https://www.machineto.com/magnetron-sputtering-coating-machine-10084028

Magnetron sputtering coating machine SG200

(2inch substrates / multi-target co-sputtering)

This equipment has a multi-target magnetron sputtering function. It is matched with two magnetron targets and reserves one target position and one pair of evaporation electrode, which can be used in magnetron sputtering and evaporation. The sputtering target power adopts corrugated pipe structure, it's convenient for adjusting the angle; sputtering target power also adopts intermediate frequency power supply, which can effectively improve the arc discharge of the target and "poisoning" phenomenon, to replace the traditional direct-current power supply. The device is mainly used to develop nano-scale single and multi-layers conductive film, semiconductor film, insulating film, as well as nickel, cobalt and other magnetic materials. Moreover, it can achieve substrate anti-splash cleaning by adding a negative bias on substrate.

Main Technical Specifications

Vacuum chamber	φ350 mm×H400mm [the user can customize the vacuum chamber size, max. Dia.2000mm]
Vacuum system	Composite molecule pump + Direct-connection sliding vane rotary vacuum pump, pneumatic vacuum valve, Digital composite vacuum gauge
Ultimate vacuum	Better than 8.0×10-5Pa
Pumping speed	Pumped from the atmosphere to 6.0 × 10-3Pa ≤ 15min
Size of Coating film	One 2-inch sample and a number of loose tablets
Substrate heating and rotation	Substrate heating: normal temperature ~ 500 °C, automatic measurement, PID temperature control; substrate rotation: 0-20 r / min, adjustable and controllable
Sputtering target specifications	Two 2-inch standard magnetron targets , reserve one target position and one pair of evaporation electrode (IF sputtering + RF sputtering)
Non-uniformity of film thickness	≤±5%
Control	Manual control
Alarm and protection	It alarms in time and executes appropriate protection measures when abnormal situations, such as water shortage, over-current, over-voltage and open circuit, happen on pumps, targets and electrodes.
Area	L × W: 1600 × 1400mm

Notes: We can custom equipemts according to your request. If you need to understand more technical indicators, please contact us freely [sale&sidolim.com]