Large anti-reflective and conductive inline magnetron sputtering continuous production line

vacuum coating, 1. Passed the ISQ9000., 2.15 vacuum chamber, 3.26 sets of turbo-molecular pump and 13 sets of mechanical pump - details see: https://www.machineto.com/large-anti-reflective-and-conductive-inline-magnetron-sputtering-continuous-production-line-10083181

Place of Origin:Hunan China (Mainland)	Brand Name:Hongda	Model Number:Anti-reflection magnetron sputtering coating line	Certification(s):ISO9000
Coating:Vacuum Coating

Large anti-reflective and conductive inline magnetron sputtering continuous production line

contact supplier for Large anti-reflective and conductive inline magnetron sputtering continuous production line

1. Coating line is introduced

The anti-reflective continuous magnetron sputtering coating line has 15 vacuum chambers,

among which, one entrance chamber, one exit chamber, one entrance buffering chamber, one exit

buffering chamber, one entrance transfer chamber, one exit transfer chamber, two transfer chambers

and seven sputtering coating chambers. Each sputtering coating chamber can be equipped with

four cathodes simultaneously. The high vacuum chamber is separated by plug valve and can realize

the multi-functional coating through changing the atmosphere separation; the carrier is driven by

magnetic steering; the equipment has 26 sets of turbo-molecular pumps and 13 sets of mechanical

pumps to get the stable pumping speed and even distribution of air.

2. Technique characteristics of coating line

Α . The production line has used the uniformity control device for deposit thickness of large area sputtering and realized the adjustment of uniformity according to situation of production.

B.The production line can produce SiO2 layer through using the control technology of piezoelectric valve and closed circuit ring.

C.The production line can produce SiO2 layer through using the control technology of piezoelectric valve and closed circuit ring.

D. The production line has adopted the advanced plug valve to separate the chambers and can realize the effective separation and stabilize the process gas. In China, our company is the only one which is able to design and process the plug valve. Benefiting from the plug valve, the design will have better sealing effect and be more durable.

E.The production line has the design of even intake pipe structure, thus the air intake is even and stable.

F.The production line has adopted the advanced magnetic steering drive system; the carriers move steady.

G. Electrical control system: taking advantages of touch screen, PLC automatic control and human-machine dialogue, realize the data display, operation and control of system.

3. Main technical parameters